描述
Pall purifier systems enable the removal of molecular contamination to sub-parts-per-billion (ppb) levels from a variety of gases used in the semiconductor, photovoltaic, LED and display industries. They are well suited for applications such as bulk delivery and gas bottle filling.
- Flow rates up to 4,000 slpm (141 scfm)
- Purifier assemblies contain integral particle filters
- Isolation valves allow for easy replacement of individual assemblies
- Custom configurations available to meet specific customer requirements
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Custom Gas Purifier Systems